Investigation of properties of Cu containing DLC films produced by PECVD process
Neeraj Dwivedi, Sushil Kumar, Hitendra K. Malik, C. Sreekumar, Saurabh Dayal, C.M.S. Rauthan, O.S. PanwarVolume:
73
Year:
2012
Language:
english
Pages:
9
DOI:
10.1016/j.jpcs.2011.10.019
File:
PDF, 737 KB
english, 2012