Combinatorial study of WInZnO films deposited by rf...

Journal of Solid State Chemistry 2011 Vol. 184; Iss. 9

Combinatorial study of WInZnO films deposited by rf magnetron co-sputtering

Byeong-Yun Oh, Jae-Cheol Park, Young-Jun Lee, Sang-Jun Cha, Joo-Hyung Kim, Kwang-Young Kim, Tae-Won Kim, Gi-Seok Heo
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Volume:
184
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.jssc.2011.07.024
File:
PDF, 651 KB
english, 2011
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