![](/img/cover-not-exists.png)
Electroplating of low stress permalloy for MEMS
Yong-hua Zhang, Gui-fu Ding, Yu-li Cai, Hong Wang, Bingchu CaiVolume:
57
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.matchar.2005.12.016
File:
PDF, 407 KB
english, 2006