High conductivity a-C:N thin films prepared by electron gun...

High conductivity a-C:N thin films prepared by electron gun evaporation

B. Rebollo-Plata, R. Lozada-Morales, R. Palomino-Merino, O. Portillo-Moreno, S. Jiménez-Sandoval, O. Zelaya-Angel
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Volume:
58
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.matchar.2006.11.010
File:
PDF, 453 KB
english, 2007
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