Enhanced stress durability of nano resonators with scandium...

Materials Characterization 2010 Vol. 61; Iss. 11

Enhanced stress durability of nano resonators with scandium doped electrodes

R. Nüssl, T. Jewula, C. Binninger, R. Drozd, W. Ruile, D. Beckmeier, T. Sulima, I. Eisele, W. Hansch
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Volume:
61
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.matchar.2010.06.018
File:
PDF, 2.27 MB
english, 2010
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