Seed layer corrosion of damascene structures in copper...

Materials Chemistry and Physics 2004 Vol. 84; Iss. 1

Seed layer corrosion of damascene structures in copper sulfonate electrolytes

Nicholas M Martyak, Pierre Ricou
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Volume:
84
Year:
2004
Language:
english
Pages:
12
DOI:
10.1016/j.matchemphys.2003.10.008
File:
PDF, 644 KB
english, 2004
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