Effect of the deposition conditions on the morphology and...

Materials Chemistry and Physics 2004 Vol. 85; Iss. 2-3

Effect of the deposition conditions on the morphology and bonding structure of SiCN films

Wenjuan Cheng, Jinchun Jiang, Yang Zhang, Hesun Zhu, Dezhong Shen
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Volume:
85
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.matchemphys.2004.01.015
File:
PDF, 485 KB
english, 2004
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