A novel method to improve VCSELs oxide-confined aperture uniformity using selective As+-implanted underlying layer
Hung-Wen Huang, C.C. Kao, Y.A. Chang, H.C. Kuo, L.H. Laih, S.C. WangVolume:
97
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.matchemphys.2005.05.046
File:
PDF, 220 KB
english, 2006