Influence of negative substrate bias voltage on the impurity concentrations in Zr films
J.-W. Lim, J.W. Bae, K. Mimura, M. IsshikiVolume:
96
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.matchemphys.2005.07.017
File:
PDF, 154 KB
english, 2006