Properties of TiN films grown by atomic-layer chemical...

Properties of TiN films grown by atomic-layer chemical vapor deposition with a modified gaseous-pulse sequence

Hsyi-En Cheng, Wen-Jen Lee
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Volume:
97
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.matchemphys.2005.08.017
File:
PDF, 546 KB
english, 2006
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