![](/img/cover-not-exists.png)
Properties of TiN films grown by atomic-layer chemical vapor deposition with a modified gaseous-pulse sequence
Hsyi-En Cheng, Wen-Jen LeeVolume:
97
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.matchemphys.2005.08.017
File:
PDF, 546 KB
english, 2006