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Effect of nitrogen flow rate on the structure and mechanical properties of ZrN thin films on Si(1 0 0) and stainless steel substrates
Jia-Hong Huang, Chi-Hsin Ho, Ge-Ping YuVolume:
102
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.matchemphys.2006.10.007
File:
PDF, 486 KB
english, 2007