Effect of sputtering power on the physical properties of dc...

Materials Chemistry and Physics 2008 Vol. 110; Iss. 2-3

Effect of sputtering power on the physical properties of dc magnetron sputtered copper oxide thin films

A. Sivasankar Reddy, Hyung-Ho Park, V. Sahadeva Reddy, K.V.S. Reddy, N.S. Sarma, S. Kaleemulla, S. Uthanna, P. Sreedhara Reddy
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Volume:
110
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.matchemphys.2008.02.031
File:
PDF, 748 KB
english, 2008
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