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Epitaxial growth of ZnO films at extremely low temperature by atomic layer deposition with interrupted flow
Ching-Shun Ku, Hsin-Yi Lee, Jheng-Ming Huang, Chih-Ming LinVolume:
120
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.matchemphys.2009.12.028
File:
PDF, 710 KB
english, 2010