Electrochemical investigation of surface reactions for...

Electrochemical investigation of surface reactions for chemically promoted chemical mechanical polishing of TaN in tartaric acid solutions

S.V.S.B. Janjam, B.C. Peethala, J.P. Zheng, S.V. Babu, D. Roy
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
123
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.matchemphys.2010.05.008
File:
PDF, 480 KB
english, 2010
Conversion to is in progress
Conversion to is failed