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Electrochemical investigation of surface reactions for chemically promoted chemical mechanical polishing of TaN in tartaric acid solutions
S.V.S.B. Janjam, B.C. Peethala, J.P. Zheng, S.V. Babu, D. RoyVolume:
123
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.matchemphys.2010.05.008
File:
PDF, 480 KB
english, 2010