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CVD of Ru, Pt and Pt-based alloy thin films using ethanol as mild reducing agent
P. Antony Premkumar, N.S. Prakash, F. Gaillard, N. BahlawaneVolume:
125
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.matchemphys.2010.09.062
File:
PDF, 590 KB
english, 2011