Electrochemical investigation of the surface-modifying roles of guanidine carbonate in chemical mechanical planarization of tantalum
S.E. Rock, D.J. Crain, J.P. Zheng, C.M. Pettit, D. RoyVolume:
129
Year:
2011
Language:
english
Pages:
12
DOI:
10.1016/j.matchemphys.2011.05.079
File:
PDF, 1.62 MB
english, 2011