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Enhanced formation and morphological stability of low-resistivity CoSi2 nanodot arrays on epitaxial Si0.7Ge0.3 virtual substrate
S.L. Cheng, C.Y. Yang, S.W. Lee, H.F. Hsu, H. ChenVolume:
130
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.matchemphys.2011.07.032
File:
PDF, 1.48 MB
english, 2011