A comparison of Ar ion implantation and swift heavy Xe ion irradiation effects on immiscible AlN/TiN multilayered nanostructures
Momir Milosavljević, Ana Grce, Davor Peruško, Marko Stojanović, Janez Kovač, Goran Dražič, Alexander Yu. Didyk, Vladimir A. SkuratovVolume:
133
Year:
2012
Language:
english
Pages:
9
DOI:
10.1016/j.matchemphys.2012.01.112
File:
PDF, 2.55 MB
english, 2012