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Synthesis and characterization of hafnium tert-butylacetoacetate as new MOCVD precursor for HfO2 films
Sergej Pasko, Liliane G. Hubert-Pfalzgraf, Adulfas AbrutisVolume:
59
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.matlet.2005.02.024
File:
PDF, 292 KB
english, 2005