A compensation of Young's modulus in polysilicon structure...

Materials Letters 2005 Vol. 59; Iss. 29-30

A compensation of Young's modulus in polysilicon structure with discontinuous material distribution

Dong-chan Lee, Hyeun-seok Choi, Chang-soo Han, Hee-jun Jeong
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Volume:
59
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.matlet.2005.07.040
File:
PDF, 656 KB
english, 2005
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