Resisting oxygen plasma damage in low-k hydrogen...

Resisting oxygen plasma damage in low-k hydrogen silsesquioxane films by hydrogen plasma treatment

Sunil Kumar Singh, A.A. Kumbhar, R.O. Dusane
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Volume:
60
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.matlet.2005.11.071
File:
PDF, 200 KB
english, 2006
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