Resisting oxygen plasma damage in low-k hydrogen silsesquioxane films by hydrogen plasma treatment
Sunil Kumar Singh, A.A. Kumbhar, R.O. DusaneVolume:
60
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.matlet.2005.11.071
File:
PDF, 200 KB
english, 2006