Anodic bonding of silicon onto glass by ion-cut technique...

Materials Letters 2007 Vol. 61; Iss. 14-15

Anodic bonding of silicon onto glass by ion-cut technique and their characterization using high resolution X-ray diffraction studies

K.K. Maurya, S.K. Halder, S.P. Chowdhury, M.B. Dutt
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Volume:
61
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.matlet.2006.10.076
File:
PDF, 456 KB
english, 2007
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