![](/img/cover-not-exists.png)
Preparation of Zr–Si thin films by a simultaneous deposition and reaction process using pulsed ion beams
H. Suematsu, T. Kishi, J. Inoue, M. Hirai, T. Suzuki, T. Yunogami, W. Jiang, K. YatsuiVolume:
61
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.matlet.2006.12.004
File:
PDF, 552 KB
english, 2007