Synthesis of regular nano-pitched carbon nanotube array by using nanosphere lithography for interconnect applications
Ting Xu, Jianmin Miao, Mohammed Ashraf, Nay Lin, Franck CholletVolume:
63
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.matlet.2009.01.048
File:
PDF, 281 KB
english, 2009