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Optical properties of pulse laser deposited AlN thin films on silicon
Fabio Chale-Lara, Mario H. Farias, Conett Huerta-Escamilla, Mufei XiaoVolume:
63
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.matlet.2009.06.061
File:
PDF, 788 KB
english, 2009