Nanocrystalline silicon thin films grown by a MF twin...

Materials Letters 2012 Vol. 68; Iss. none

Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils

Junhua Gao, Lin Zhang, Jinquan Xiao, Jun Gong, Chao Sun, Lishi Wen
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Volume:
68
Year:
2012
Language:
english
Pages:
3
DOI:
10.1016/j.matlet.2011.11.009
File:
PDF, 666 KB
english, 2012
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