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Computer aided modelling and diaphragm design approach for high sensitivity silicon-on-insulator pressure sensors
M. Narayanaswamy, R. Joseph Daniel, K. Sumangala, C. Antony JeyaseharVolume:
44
Year:
2011
Language:
english
Pages:
13
DOI:
10.1016/j.measurement.2011.08.025
File:
PDF, 1.03 MB
english, 2011