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An Improved Fourier Five-Sensor (IF5S) method for separating straightness and yawing errors of a linear slide based on multiple sensor parameter sets and least square regression technique
Eric H.K. Fung, M. ZhuVolume:
45
Year:
2012
Language:
english
Pages:
8
DOI:
10.1016/j.measurement.2012.01.048
File:
PDF, 393 KB
english, 2012