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UV curing of resists for warm embossing
M. Wissen, H. Schulz, N. Bogdanski, H.-C. Scheer, Y. Hirai, H. Kikuta, G. Ahrens, F. Reuther, K. PfeifferVolume:
73-74
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.02.038
File:
PDF, 351 KB
english, 2004