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Dry ashing process evaluation for porous ULK films
O. Louveau, C. Bourlot, A. Marfoure, I. Kalinovski, J. Su, G. Hills, D. LouisVolume:
73-74
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.02.066
File:
PDF, 665 KB
english, 2004