Characterization of GaAs-based micro-origami mirrors by...

Microelectronic Engineering 2004 Vol. 73-74; Iss. none

Characterization of GaAs-based micro-origami mirrors by optical actuation

José M. Zanardi Ocampo, Pablo O. Vaccaro, Kazuyoshi Kubota, Thomas Fleischmann, Te-Sheng Wang, Tahito Aida, Toshiaki Ohnishi, Akira Sugimura, Ryo Izumoto, Makoto Hosoda, Shigeki Nashima
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Volume:
73-74
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.03.012
File:
PDF, 308 KB
english, 2004
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