Realization and characterization of nano-scale FinFET...

Microelectronic Engineering 2004 Vol. 73-74; Iss. none

Realization and characterization of nano-scale FinFET devices

J. Kretz, L. Dreeskornfeld, R. Schröter, E. Landgraf, F. Hofmann, W. Rösner
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Volume:
73-74
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.03.055
File:
PDF, 286 KB
english, 2004
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