Effect of experimental parameters on doping contrast of Si p–n junctions in a FEG-SEM
P. Kazemian, C. Rodenburg, C.J. HumphreysVolume:
73-74
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2004.03.080
File:
PDF, 225 KB
english, 2004