Damascene TiN–Gd2O3-gate stacks: Gentle fabrication and...

Microelectronic Engineering 2011 Vol. 88; Iss. 12

Damascene TiN–Gd2O3-gate stacks: Gentle fabrication and electrical properties

Ralf Endres, Tillmann Krauss, Frank Wessely, Udo Schwalke
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
88
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2010.05.013
File:
PDF, 1.61 MB
english, 2011
Conversion to is in progress
Conversion to is failed