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Damascene TiN–Gd2O3-gate stacks: Gentle fabrication and electrical properties
Ralf Endres, Tillmann Krauss, Frank Wessely, Udo SchwalkeVolume:
88
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2010.05.013
File:
PDF, 1.61 MB
english, 2011