Evolution of stress gradients in Cu films and features induced by capping layers
Conal E. Murray, E.T. Ryan, Paul R. Besser, C. Witt, Jean L. Jordan-Sweet, M.F. ToneyVolume:
92
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2010.11.043
File:
PDF, 799 KB
english, 2012