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Influence of the deposition temperature on the properties of copper thin films prepared by alternating injection of Cu(ethylketoiminate)2 and H2 on a ruthenium substrate
Kwang-Min Park, Jae-Kyung Kim, Byeol Han, Won-Jun Lee, Jinsik Kim, Hyun-Koock ShinVolume:
89
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2011.02.111
File:
PDF, 469 KB
english, 2012