Creation of convex microlenses in PDMS with focused MeV ion beam
S.Z. Szilasi, N. Hegman, A. Csik, I. RajtaVolume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2011.03.007
File:
PDF, 526 KB
english, 2011