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A study of the leakage current in TiN/HfO2/TiN capacitors
S. Cimino, A. Padovani, L. Larcher, V.V. Afanas’ev, H.J. Hwang, Y.G. Lee, M. Jurczac, D. Wouters, B.H. Lee, H. Hwang, L. PantisanoVolume:
95
Year:
2012
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2011.03.009
File:
PDF, 441 KB
english, 2012