Dynamic study on microstructural evolution of nickel...

Microelectronic Engineering 2012 Vol. 89; Iss. none

Dynamic study on microstructural evolution of nickel germanide utilizing zirconium interlayer

Jae-Wook Lee, Jee-Hwan Bae, Ji-Hye Hwang, Hyung-Kyu Kim, Min-Ho Park, Hyoungsub Kim, Cheol-Woong Yang
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Volume:
89
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2011.03.010
File:
PDF, 664 KB
english, 2012
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