Development of a slow-wave MEMS phase shifter on CMOS...

Microelectronic Engineering 2012 Vol. 90; Iss. none

Development of a slow-wave MEMS phase shifter on CMOS technology for millimeter wave frequencies

Gustavo Rehder, Trang Vo, Philippe Ferrari
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Volume:
90
Year:
2012
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2011.03.018
File:
PDF, 665 KB
english, 2012
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