Effect of mechanical process parameters on friction behavior and material removal during sapphire chemical mechanical polishing
Zefang Zhang, Weixia Yan, Lei Zhang, Weili Liu, Zhitang SongVolume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2011.04.068
File:
PDF, 399 KB
english, 2011