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Contact edge roughness metrology in nanostructures: Frequency analysis and variations
M.K. Vijaya-Kumar, Vassilios Constantoudis, Evangelos Gogolides, Alessandro Vaglio Pret, Roel GronheidVolume:
90
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2011.05.013
File:
PDF, 1.36 MB
english, 2012