Frequency dependent dielectric properties and electrical conductivity of platinum silicide/Si contact structures with diffusion barrier
I.M. Afandiyeva, M.M. Bülbül, Ş. Altındal, S. BengiVolume:
93
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2011.05.041
File:
PDF, 648 KB
english, 2012