Soft UV-nanoimprint lithography on non-planar surfaces
Bahador Farshchian, Alborz Amirsadeghi, Steven M. Hurst, Jiahao Wu, Jaejong Lee, Sunggook ParkVolume:
88
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2011.07.010
File:
PDF, 782 KB
english, 2011