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Effects of chemical mechanical polishing on a porous SiCOH dielectric
S. Gates, S. Papa Rao, V. Anandan, M. Krishnan, S. Cohen, Y. Ostrovski, N. Klymko, M. Chace, D. CanaperiVolume:
91
Year:
2012
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2011.08.005
File:
PDF, 779 KB
english, 2012