Contacts on high aspect ratio 3D structures
R. Neumann, M. Al-Suleiman, M. Erenburg, J. Ledig, H.-H. Wehmann, A. WaagVolume:
88
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2011.09.002
File:
PDF, 417 KB
english, 2011