Full wafer microstructure fabrication by continuous...

Full wafer microstructure fabrication by continuous UV-assisted roller imprinting lithography to enhance light extraction of LEDs

Yeeu-Chang Lee, Bo-Ting Chen, Tso-Hsiang Wu, Yen-Yu Chou
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Volume:
91
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2011.11.005
File:
PDF, 1.51 MB
english, 2012
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