Patterning of polystyrene thin films by solvent-assisted...

Microelectronic Engineering 2012 Vol. 94; Iss. none

Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting

Kuan-Liang Lai, Shiau-Fong Hsiao, Min-Hsiung Hon, Ing-Chi Leu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
94
Year:
2012
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2011.11.009
File:
PDF, 1.03 MB
english, 2012
Conversion to is in progress
Conversion to is failed