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Effect of deposition conditions on thermo-mechanical properties of free standing silicon-rich silicon nitride thin film
Yun Hwangbo, Jung-Min Park, Walter L. Brown, Jun-Hwan Goo, Hak-Joo Lee, Seungmin HyunVolume:
95
Year:
2012
Language:
english
Pages:
8
DOI:
10.1016/j.mee.2012.03.003
File:
PDF, 1.01 MB
english, 2012