mesoporous thin films studied by Atmospheric Ellipsometric...

mesoporous thin films studied by Atmospheric Ellipsometric Porosimetry: A case of contamination

O. Dubreuil, J. Dewalque, G. Chêne, F. Mathis, G. Spronck, D. Strivay, R. Cloots, C. Henrist
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Volume:
145
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.micromeso.2011.04.013
File:
PDF, 842 KB
english, 2011
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